I-5-Axis Milled insulators yeCeramic yeSemiconductor izixhobo kunye namagumbi acocekileyo

Kwihlabathi eliphakamileyo lemveliso ye-semiconductor kunye neendawo ezicocekileyo zegumbi, onke amacandelo kufuneka anike ukusebenza okungenasiphako. NgePFT, sigxile ekwenzeniI-5-axis milled i-ceramic insulatorsechaza ngokutsha ukuchaneka nokuthembeka. Ngaphezulu kwe20+iminyaka yobuchwephesha, izisombululo zethu zenziwe ukuba zihlangabezane neemfuno ezichanekileyo zezixhobo ze-semiconductor, ukuqinisekisa ukuzinza kwe-thermal, ukugquma kombane, kunye nokusebenza okungenalo ungcoliseko kwiisetingi ze-ultra-sensitive.

Kutheni ukhetha i-5-Axis Milled Ceramic Insulators yethu?

1.Ubuchule bokuVelisa abaPhezulu

Indawo yethu ixhotyiswe ngeoomatshini bokugaya be-5-axis be-CNC, eyenza ukuchaneka kwe-micron-level kwi-ceramics eziphambili njenge-alumina (Al₂O₃), i-silicon carbide (SiC), kunye ne-aluminium nitride (AlN). Ngokungafaniyo neendlela eziqhelekileyo, i-5-axis machining ivumela iijiyometri ezintsonkothileyo-zibaluleke kakhulu kumacandelo afana nezikhonkwane zokuphakamisa i-wafer, iinxalenye zegumbi lokubeka, kunye nezithinteli zeplasma ezinganyangekiyo.

Ezona mpawu:

•Ukuchaneka:±0.005mm ukunyamezela ukudibanisa ngokungenamthungo kwizixhobo ze-ASML lithography okanye iinkqubo ze-etch zoPhando lweLam.
•Izinto eziNyeezohlukeneyo:Ilungiselelwe i-99.8% ye-alumina, i-SiC ecocekileyo, kunye nezinye iiseramikhi eziphambili.
•Ukugqitywa komphezulu:Ra <0.2μm ukunciphisa isizukulwana particulate ISO Class 1 amagumbi acocekileyo.

2.Ubunjineli beNkqubo yobunini

Iinjineli zethu ziye zaphuhlisaulawulo lwenkqubo evaliweyoezilungelelanisa ubuqhophololo beceramic ngexesha lomatshini. Ngokudibanisa iindlela zokugaya ezomileyo kunye ne-real-time vibration damping, sifezekisa iindawo ezingenakuqhekeka kunye nobude bobomi becandelo elongeziweyo-naphantsi kwebhayisikile eshushu kakhulu (ukuya kwi-1,600 ° C).

Ukujongwa okutsha:

•IiProthokholi zoNcedo loxinzelelo:Ukunciphisa i-micro-fractures kwi-AlN insulators kwizicelo ze-CVD.
•Unyango lwasemva koMatshini:I-HIP (I-Hot Isostatic Pressing) iphakamisa ukuxinana kunye nokuxhathisa ukubola.

3.UQinisekiso loMgangatho olungqongqo

Yonke i-insulator iyangenaUkuhlolwa kwenqanaba le-12, kuquka:

•CMM (Lungelelanisa uMshini wokuMisa)ukuqinisekiswa kwemilinganiselo ebalulekileyo.
•Uvavanyo lokuvuza kwe-Heliumukuhambelana vacuum.
•I-EDS (Energy-Dispersive X-ray Spectroscopy)ukuqinisekisa ubunyulu bezinto eziphathekayo.

YethuInkqubo eqinisekisiweyo ye-ISO 9001/14001iqinisekisa ukulandeleka ukusuka ekuthengweni kwezinto ekrwada (efunyenwe kubathengisi beSigaba 1 abafana neCoorsTek) ukuya kwipakethe yokugqibela.

Usetyenziso: Apho uKuchaneka Kudibana noMsebenzi

Ii-insulators zethu zithenjwa:

•I-Etch & Deposition Tools:Amacandelo afakwe kwi-SiC yokumelana neplasma kwiimodyuli ze-Applied Materials™.
•Ii-Ion Implanters:Izikhonkwane zokuphakamisa i-alumina ezineengubo ezichasene ne-static ukukhusela i-wafer slippage.
•IiNkqubo zeMetrology:Ii-insulators ezisezantsi ze-thermal-expansion zezigaba ze-EUV lithography.

Into yokuphonononga:I-OEM ehamba phambili ye-semiconductor yanciphisa ixesha lokuphumla kwesixhobo ngama-40% emva kokutshintshela kwiishawari zethu ze-SiC ezenzelwe isiko, eziqhube kakuhle kakhulu kunabanye abantu okhuphisana nabo kwi-300mm wafer processing.

Ngaphaya kokuVeliswa: Indlela yoBudlelwane

•Ukuchwetheza okuKhawulezayo:Ngenisa iifayile zakho zeCAD kwaye ufumane iiprototypes ezisebenzayo kwiintsuku ezisi-7.
•Ukupakishwa kwegumbi lokucoca kwisiza:Ukudityaniswa kwegumbi elicocekileyo leClass 10 lokudibanisa ngqo isixhobo.
•Inkxaso yobuGcisa ubomi bonke:Iinjineli zethu zibonelela ngohlalutyo lokunxiba kunye neenkonzo zokuphinda zenziwe ngoomatshini ukwandisa imijikelo yobomi.